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Browsing by Author Tseng, MH
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Showing results 1 to 2 of 2
Issue Date
Title
Author(s)
1-Nov-2000
A novel process and thermodynamic mechanisms of air gap formation for ULSI application
Chang, KM
;
Yang, JY
;
Chen, LW
;
Tseng, MH
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Nov-2001
Using NH3 plasma pretreatment to improve the characteristics of organic spin-on low-k materials for copper metallization
Chang, KM
;
Tseng, MH
;
Deng, IC
;
Tsai, YP
;
Yeh, SJ
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics