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Issue DateTitleAuthor(s)
1997以濺鍍方式沉積鎢-矽-氮擴散障礙層在銅金屬化應用上之研究陳重安; Chen, Chong-An; 林鵬; 孫喜眾; Lin, Peng; Sun, Xi-Zhong; 材料科學與工程學系
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