Browsing by Subject ozone ashing
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Jul-2005 | The preparation of mesoporous silica ultra-low-k film using ozone ashing treatment | Cho, AT; Pan, FM; Chao, KJ; Liu, PH; Chen, JY; 材料科學與工程學系; Department of Materials Science and Engineering |