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1984光化學氣相沈積系統與其生長之二氧化矽膜特性陳家湘; CHEN, JIA-XIANG; 黃凱雄; 謝正雄; 楊聲震; HUANG, KAI-XIONG; XIE, ZHENG-XIONG; YANG, SHENG-ZHEN; 光電工程學系
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