Browsing by Author Aomi, H
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
| 2002 | Impact of airborne molecular contamination to nano-device performance | Yeh, CF; Hsiao, CW; Lin, SJ; Xie, ZM; Kusumi, T; Aomi, H; Kaneko, H; Da, BT; Tsai, MS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-May-2004 | The removal of airborne molecular contamination in cleanroom using PTFE and chemical filters | Yeh, CF; Hsiao, CW; Lin, SJ; Hsieh, CM; Kusumi, T; Aomi, H; Kaneko, H; Dai, BT; Tsai, MS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
