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Browsing by Author Chang, SC
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Showing results 1 to 20 of 37
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Issue Date
Title
Author(s)
1-May-2005
Aplication of plasma immersion ion implantation on seeding copper electroplating for multilevel interconnection
Chiu, SY
;
Wang, YL
;
Chang, SC
;
Feng, MS
;
材料科學與工程學系
;
Department of Materials Science and Engineering
2006
Behavior of membrane scaling during crossflow filtration in the anaerobic MBR system
You, HS
;
Huang, CP
;
Pan, JR
;
Chang, SC
;
環境工程研究所
;
Institute of Environmental Engineering
1-Nov-2000
Characterization of additive systems for damascene Cu electroplating by the superfilling profile monitor
Chiu, SY
;
Shieh, JM
;
Chang, SC
;
Lin, KC
;
Dai, BT
;
材料科學與工程學系
;
Department of Materials Science and Engineering
15-Aug-2002
Dependence of luminescence efficiency on dopant concentration and sintering temperature in the erbium-doped Ba0.7Sr0.3TiO3 thin films
Kuo, SY
;
Chen, CS
;
Tseng, TY
;
Chang, SC
;
Hsieh, WF
;
電子工程學系及電子研究所
;
光電工程學系
;
Department of Electronics Engineering and Institute of Electronics
;
Department of Photonics
1-Sep-2002
The effect of plating current densities on self-annealing Behaviors of electroplated copper films
Chang, SC
;
Shieh, JM
;
Dai, BT
;
Feng, MS
;
Li, YH
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-May-2002
Electroplating copper in sub-100 nm gaps by additives with low consumption and diffusion ability
Lin, KC
;
Shieh, JM
;
Chang, SC
;
Dai, BT
;
Chen, CF
;
Feng, MS
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-Dec-1997
Enhancement of anaerobic digestion of waste activated sludge by alkaline solubilization
Lin, JG
;
Chang, CN
;
Chang, SC
;
環境工程研究所
;
Institute of Environmental Engineering
20-Sep-2004
Growth and characterization of tungsten carbide nanowires by thermal annealing of sputter-deposited WCx films
Wang, SJ
;
Chen, CH
;
Chang, SC
;
Uang, KM
;
Juan, CP
;
Cheng, HC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Mar-2006
High-selectivity damascene chemical mechanical polishing
Chiu, SY
;
Wang, YL
;
Liu, CP
;
Chang, SC
;
Hwang, GJ
;
Feng, MS
;
Chen, CF
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-Jan-2006
Hole states of X-Bi2Sr2CaCu2O8 [X=I, HgI2, and (Py-CH3)(2)HgI4] probed by OK-edge X-ray absorption spectroscopy
Chen, JM
;
Chang, SC
;
Liu, RS
;
Lee, JM
;
Park, M
;
Choy, JH
;
電子物理學系
;
Department of Electrophysics
1-Mar-2003
Improving the quality of electroplated copper films by rapid thermal annealing
Chang, SC
;
Shieh, JM
;
Dai, BT
;
Feng, MS
;
Wang, YL
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-Nov-2002
Investigation of carrying agents on microstructure of electroplated Cu films
Shieh, JM
;
Chang, SC
;
Dai, BT
;
Feng, MS
;
材料科學與工程學系
;
Department of Materials Science and Engineering
24-Feb-2006
Investigation of overpotential and seed thickness on damascene copper electroplating
Chen, KW
;
Wang, YL
;
Chang, L
;
Li, FY
;
Chang, SC
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-Aug-2002
Investigation of superfilling and electrical characteristics in low-impurity-incorporated Cu metallization
Shieh, JM
;
Chang, SC
;
Dai, BT
;
Feng, MS
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-May-2001
Investigations of effects of bias polarization and chemical parameters on morphology and filling capability of 130 nm damascene electroplated copper
Chang, SC
;
Shieh, JM
;
Lin, KC
;
Dai, BT
;
Wang, TC
;
Chen, CF
;
Feng, MS
;
Li, YH
;
Lu, CP
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-Nov-2002
Investigations of pulse current electrodeposition for damascene copper metals
Chang, SC
;
Shieh, JM
;
Dai, BT
;
Feng, MS
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-Nov-2002
Leveling effects of copper electrolytes with hybrid-mode additives
Lin, KC
;
Shieh, JM
;
Chang, SC
;
Dai, BT
;
Chen, CF
;
Feng, MS
;
Li, YH
;
材料科學與工程學系
;
Department of Materials Science and Engineering
1-Mar-2006
Mechanism for Cu void defect on various electroplated film conditions
Feng, HP
;
Cheng, MY
;
Wang, YL
;
Chang, SC
;
Wang, YY
;
Wan, CC
;
材料科學與工程學系
;
Department of Materials Science and Engineering
2002
Micro-photoluminescence from V-shape inverted pyramid in HVPE grown GaN film
Lee, CK
;
Chen, YB
;
Chang, SC
;
Pan, CL
;
Wang, SC
;
光電工程學系
;
Department of Photonics
1-Sep-2002
Microleveling mechanisms and applications of electropolishing on planarization of copper metallization
Chang, SC
;
Shieh, JM
;
Huang, CC
;
Dai, BT
;
Li, YH
;
Feng, MS
;
材料科學與工程學系
;
Department of Materials Science and Engineering