瀏覽 的方式： 作者 Chang, ST
顯示 1 到 3 筆資料，總共 3 筆
| 公開日期 | 標題 | 作者 |
| 31-十月-1997 | Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity | Wang, YL; Liu, C; Chang, ST; Tsai, MS; Feng, MS; Tseng, WT; 材料科學與工程學系; 電子工程學系及電子研究所; Department of Materials Science and Engineering; Department of Electronics Engineering and Institute of Electronics |
| 2001 | Novel strategies of FSG-CMP for within-wafer uniformity improvement and wafer edge yield enhancement beyond 0.18 micro technologies | Chen, KW; Wang, YL; Chang, L; Liu, CW; Lin, YK; Wang, TC; Chang, ST; Lo, KY; 材料科學與工程學系; Department of Materials Science and Engineering |
| 1-八月-1998 | Performance evaluation of an API Aerosizer (TM) | Tsai, CJ; Chein, HM; Chang, ST; Kuo, JY; 環境工程研究所; Institute of Environmental Engineering |
