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Browsing by Author Chang, Tuwon
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Issue Date
Title
Author(s)
2008
Use of Spin-On-Hard Mask Materials for nano scale patterning technology
Wu, Wen-Hao
;
Chang, Edward Y.
;
Cheon, Hwan-Sung
;
Kim, Sang Kyun
;
Cho, Hyeon Mo
;
Yoon, Kyong-Ho
;
Kim, Jong Seob
;
Chang, Tuwon
;
Shin, Seongho
;
材料科學與工程學系
;
Department of Materials Science and Engineering
