瀏覽 的方式: 作者 Cheng, YF
顯示 1 到 4 筆資料,總共 4 筆
| 公開日期 | 標題 | 作者 |
| 1-十一月-1999 | Effectively blocking copper diffusion at low-k hydrogen silsesquioxane/copper interface | Liu, PT; Chang, TC; Yang, YL; Cheng, YF; Shih, FY; Lee, JK; Tsai, E; Sze, SM; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-九月-2000 | Effects of NH3-plasma nitridation on the electrical characterizations of low-k hydrogen silsesquioxane with copper interconnects | Liu, PT; Chang, TC; Yang, YL; Cheng, YF; Sze, SM; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 2000 | High-performance integration of copper interconnects with low-k hydrogen silsesquioxane employing deuterium plasma treatment | Liu, PT; Chang, TC; Yang, YL; Cheng, YF; Lee, JK; Shih, FY; Tsai, E; Chen, G; Sze, SM; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-三月-2000 | Improvement on intrinsic electrical properties of low-k hydrogen silsesquioxane/copper interconnects employing deuterium plasma treatment | Liu, PT; Chang, TC; Yang, YL; Cheng, YF; Lee, JK; Shih, FY; Tsai, E; Chen, G; Sze, SM; 材料科學與工程學系; 電子工程學系及電子研究所; Department of Materials Science and Engineering; Department of Electronics Engineering and Institute of Electronics |