瀏覽 的方式: 作者 Chiou, SG
顯示 1 到 5 筆資料,總共 5 筆
| 公開日期 | 標題 | 作者 |
| 1-二月-1997 | Resist-related damage on ultrathin gate oxide during plasma ashing | Chien, CH; Chang, CY; Lin, HC; Chang, TF; Chiou, SG; Chen, LP; Huang, TY; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-二月-1997 | Resist-related damage on ultrathin gate oxide during plasma ashing | Chien, CH; Chang, CY; Lin, HC; Chang, TF; Chiou, SG; Chen, LP; Huang, TY; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-七月-1997 | The role of a resist during O-2 plasma ashing and its impact on the reliability evaluation of ultrathin gate oxides | Chien, CH; Chang, CY; Lin, HC; Chang, TF; Hsien, SK; Tseng, HC; Chiou, SG; Huang, TY; 交大名義發表; 奈米中心; National Chiao Tung University; Nano Facility Center |
| 1-五月-1997 | The role of resist for ultrathin gate oxide degradation during O-2 plasma ashing | Chien, CH; Chang, CY; Lin, HC; Chiou, SG; Huang, TY; Chang, TF; Hsien, SK; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-五月-1997 | The role of resist for ultrathin gate oxide degradation during O-2 plasma ashing | Chien, CH; Chang, CY; Lin, HC; Chiou, SG; Huang, TY; Chang, TF; Hsien, SK; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |