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Browsing by Author Chiu, Tai-Jung
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Issue Date
Title
Author(s)
1-May-2010
Effect of fluorine flow and deposition temperature on physical characteristics and stability of fluorine-doped siloxane-based low-dielectric-constant material
Cheng, Yi-Lung
;
Wu, Jiung
;
Chiu, Tai-Jung
;
材料科學與工程學系
;
Department of Materials Science and Engineering
