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Issue Date
Title
Author(s)
1-Mar-1998
TiSixOy as an absorptive shifter for embedded phase-shifting mask in 248 nm and the modification of R-T method for the determination of shifter's n and k
Loong, WA
;
Chen, CW
;
Chang, YH
;
Lin, CM
;
Cui, Z
;
Lung, CA
;
應用化學系
;
Department of Applied Chemistry
