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Browsing by Author Gu, Siang-Sheng
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Jun-2019
Improvement of ferroelectric properties in undoped hafnium oxide thin films using thermal atomic layer deposition
Luo, Jun-Dao
;
Zhang, He-Xin
;
Wang, Zheng-Ying
;
Gu, Siang-Sheng
;
Yeh, Yun-Tien
;
Chung, Hao-Tung
;
Chuang, Kai-Chi
;
Liao, Chan-Yu
;
Li, Wei-Shuo
;
Li, Yi-Shao
;
Li, Kai-Shin
;
Lee, Min-Hung
;
Cheng, Huang-Chung
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics