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Browsing by Author Horng, Jeng-Haur

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Issue DateTitleAuthor(s)
12-Jan-2011Analyses and experimental confirmation of removal performance of silicon oxide film in the chemical-mechanical polishing (CMP) process with pattern geometry of concentric groove padsWei, Chin-Chung; Horng, Jeng-Haur; Lee, An-Chen; Lin, Jen-Fin; 機械工程學系; Department of Mechanical Engineering
2014Design of a new micro single flute drillLee, An-Chen; Horng, Jeng-Haur; Nguyen Danh Tuyen; Hsiao, Kuo-Mo; 機械工程學系; Department of Mechanical Engineering
1-May-2014Robustness Analysis of Mixed Product Run-to-Run Control for Semiconductor Process Based on ODOB Control StructureLee, An-Chen; Horng, Jeng-Haur; Kuo, Tzu-Wei; Chou, Nan-Hung; 機械工程學系; Department of Mechanical Engineering
Showing results 1 to 3 of 3