Browsing by Author Hsia, CC
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
| 1999 | Anti-reflection strategies for sub-0.18-mu m dual damascene structure patterning in KrF 248nm lithography | Chou, SY; Wang, CM; Hsia, CC; Chen, LJ; Hwang, GW; Lee, SD; Lou, JC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-Dec-2000 | Plasma charging damage during contact hole etch in high-density plasma etcher | Tsui, BY; Lin, SS; Tsai, CS; Hsia, CC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
