Browsing by Author Hwang, M.
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
| 1-Aug-2008 | High density and low leakage current in TiO(2) MIM capacitors processed at 300 degrees C | Cheng, C. H.; Lin, S. H.; Jhou, K. Y.; Chen, W. J.; Chou, C. P.; Yeh, F. S.; Hu, J.; Hwang, M.; Arikado, T.; McAlister, S. P.; 機械工程學系; 電子工程學系及電子研究所; Department of Mechanical Engineering; Department of Electronics Engineering and Institute of Electronics |
| 1-Oct-2008 | Improvement of the performance of TiHfO MIM capacitors by using a dual plasma treatment of the lower electrode | Cheng, C. H.; Pan, H. C.; Huang, C. C.; Chou, C. P.; Hsiao, C. N.; Hu, J.; Hwang, M.; Arikado, T.; McAlister, S. P.; Chin, Albert; 機械工程學系; 電子工程學系及電子研究所; Department of Mechanical Engineering; Department of Electronics Engineering and Institute of Electronics |