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Browsing by Author Kikuchi, Akio
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Feb-2017
Impacts of plasma-induced damage due to UV light irradiation during etching on Ge fin fabrication and device performance of Ge fin field-effect transistors
Mizubayashi, Wataru
;
Noda, Shuichi
;
Ishikawa, Yuki
;
Nishi, Takashi
;
Kikuchi, Akio
;
Ota, Hiroyuki
;
Su, Ping-Hsun
;
Li, Yiming
;
Samukawa, Seiji
;
Endo, Kazuhiko
;
交大名義發表
;
National Chiao Tung University
