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Browsing by Author Kuo, Tzu-Wei

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Showing results 1 to 5 of 5
Issue DateTitleAuthor(s)
1-Apr-2012Combined Product and Tool Disturbance Estimator for the Mix-Product Process and Its Application to the Removal Rate Estimation in CMP ProcessLee, An-Chen; Kuo, Tzu-Wei; Ma, Chung-Ting; 機械工程學系; Department of Mechanical Engineering
2011Modified Double EWMA Approach for Mixed Product Run-to-Run CMP Process ControlLee, An-Chen; Kuo, Tzu-Wei; Lee, Zeng-Lien; 機械工程學系; Department of Mechanical Engineering
1-May-2014Robustness Analysis of Mixed Product Run-to-Run Control for Semiconductor Process Based on ODOB Control StructureLee, An-Chen; Horng, Jeng-Haur; Kuo, Tzu-Wei; Chou, Nan-Hung; 機械工程學系; Department of Mechanical Engineering
1-Aug-2007Run-by-run process control of metal sputter deposition: Combining time series and extended kalman filterChen, Juhn-Horng; Kuo, Tzu-Wei; Lee, An-Chen; 機械工程學系; Department of Mechanical Engineering
2011半導體批次控制研究及其應用於混貨製程郭子瑋; Kuo, Tzu-Wei; 李安謙; Lee, An-Chen; 機械工程學系
Showing results 1 to 5 of 5