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Browsing by Author Lim, HF
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Issue Date
Title
Author(s)
1-Dec-2003
High-performance MIM capacitor using ALD high-k HfO2-Al2O3 laminate dielectrics
Ding, SJ
;
Hu, H
;
Lim, HF
;
Kim, SJ
;
Yu, XF
;
Zhu, CX
;
Li, MF
;
Cho, BJ
;
Chan, DSH
;
Rustagi, SC
;
Yu, MB
;
Chin, A
;
Kwong, DL
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics