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Browsing by Author Ling, KJ
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Nov-1999
Deposition of silicon carbon nitride films by ion beam sputtering
Wu, JJ
;
Wu, CT
;
Liao, YC
;
Lu, TR
;
Chen, LC
;
Chen, KH
;
Hwa, LG
;
Kuo, CT
;
Ling, KJ
;
材料科學與工程學系
;
Department of Materials Science and Engineering
