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Browsing by Author Liu, WJ
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Issue Date
Title
Author(s)
1-Apr-2005
Microstructural evolution and formation of highly c-axis-oriented aluminum nitride films by reactively magnetron sputtering deposition
Liu, WJ
;
Wu, SJ
;
Chen, CM
;
Lai, YC
;
Chuang, CH
;
光電工程學系
;
Department of Photonics
