Browsing by Author Lung, CA
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
| 1-Feb-1997 | Study on optimization of annular off-axis illumination using Taguchi method for 0.35 mu m dense line/space | Loong, WA; Tseng, JC; Chen, TC; Lung, CA; 交大名義發表; 應用化學系; National Chiao Tung University; Department of Applied Chemistry |
| 1-Mar-1998 | TiSixOy as an absorptive shifter for embedded phase-shifting mask in 248 nm and the modification of R-T method for the determination of shifter's n and k | Loong, WA; Chen, CW; Chang, YH; Lin, CM; Cui, Z; Lung, CA; 應用化學系; Department of Applied Chemistry |
