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National Chiao Tung University Institutional Repository
Browsing by Author Luo, Chih-wei
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Apr-2008
Using spike-anneal to reduce interfacial layer thickness and leakage current in metal-oxide-semiconductor devices with TaN/Atomic layer deposition-grown HfAlO/chemical oxide/Si structure
Tsai, Bo-An
;
Lee, Yao-Jen
;
Peng, Hsin-Yi
;
Tzeng, Pei-Jer
;
Luo, Chih-wei
;
Chang-Liao, Kuei-Shu
;
電子物理學系
;
Department of Electrophysics
