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National Chiao Tung University Institutional Repository
Browsing by Author Miura, M.
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Jan-2018
Ge FinFET CMOS Inverters With Improved Channel Surface Roughness by Using In-Situ ALD Digital O-3 Treatment
Yeh, M. -S.
;
Luo, G. -L.
;
Hou, F. -J.
;
Sung, P. -J.
;
Wang, C. -J.
;
Su, C. -J.
;
Wu, C. -T.
;
Huang, Y. -C.
;
Hong, T. -C.
;
Chao, T. -S.
;
Chen, B. -Y.
;
Chen, K. -M.
;
Wu, Y. -C.
;
Izawa, M.
;
Miura, M.
;
Morimoto, M.
;
Ishimura, H.
;
Lee, Y. -J.
;
Wu, W. -F.
;
Yeh, W. -K.
;
電子物理學系
;
Department of Electrophysics
