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Browsing by Author Moisa, S
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Showing results 1 to 4 of 4
Issue Date
Title
Author(s)
1-May-2002
Characterization of thin ZrO2 films deposited using Zr(O '-Pr)(2)(thd)(2) and O-2 on Si(100)
Chen, HW
;
Landheer, D
;
Wu, X
;
Moisa, S
;
Sproule, GI
;
Chao, TS
;
Huang, TY
;
電子物理學系
;
電子工程學系及電子研究所
;
Department of Electrophysics
;
Department of Electronics Engineering and Institute of Electronics
1-Jun-2002
Physical and electrical characterization of ZrO(2) gate insulators deposited on Si(100) using Zr(O(i)-Pr)(2)(thd)(2) and O(2)
Chen, HW
;
Huang, TY
;
Landheer, D
;
Wu, X
;
Moisa, S
;
Sproule, GI
;
Chao, TS
;
電子物理學系
;
電子工程學系及電子研究所
;
Department of Electrophysics
;
Department of Electronics Engineering and Institute of Electronics
1-Jun-2002
Physical and electrical characterization of ZrO2 gate insulators deposited on Si(100) using Zr(O-i-Pr)(2)(thd)(2) and O-2
Chen, HW
;
Huang, TY
;
Landheer, D
;
Wu, X
;
Moisa, S
;
Sproule, GI
;
Chao, TS
;
電子物理學系
;
電子工程學系及電子研究所
;
Department of Electrophysics
;
Department of Electronics Engineering and Institute of Electronics
1-Jul-2003
Ultrathin zirconium silicate films deposited on Si(100) using Zr(O(i)-Pr)(2)(thd)(2), Si(O(t)-Bu)(2)(thd)(2), and nitric oxide
Chen, HW
;
Huang, TY
;
Landheer, D
;
Wu, X
;
Moisa, S
;
Sproule, GI
;
Kim, JK
;
Lennard, WN
;
Chao, TS
;
電子物理學系
;
電子工程學系及電子研究所
;
Department of Electrophysics
;
Department of Electronics Engineering and Institute of Electronics