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National Chiao Tung University Institutional Repository
Browsing by Author Mori, Tadayoshi
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Issue Date
Title
Author(s)
1-Aug-2007
Highly sensitive focus monitoring on production wafer by scatterometry measurements for 90/65-nm node devices
Kawachi, Toshihide
;
Fudo, Hidekimi
;
Iwata, Yoshio
;
Matsumoto, Shunichi
;
Sasazawa, Hideaki
;
Mori, Tadayoshi
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
