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Browsing by Author Nakamura, K
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Dec-1996
A simple fabrication process of T-shaped gates using a deep-UV/electron-beam/deep-UV tri-layer resist system and electron-beam lithography
Lai, YL
;
Chang, EY
;
Chang, CY
;
Yang, HPD
;
Nakamura, K
;
Shy, SL
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
