Browsing by Author Nishi, Takashi
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
| 1-Feb-2017 | Impacts of plasma-induced damage due to UV light irradiation during etching on Ge fin fabrication and device performance of Ge fin field-effect transistors | Mizubayashi, Wataru; Noda, Shuichi; Ishikawa, Yuki; Nishi, Takashi; Kikuchi, Akio; Ota, Hiroyuki; Su, Ping-Hsun; Li, Yiming; Samukawa, Seiji; Endo, Kazuhiko; 交大名義發表; National Chiao Tung University |
