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National Chiao Tung University Institutional Repository
Browsing by Author Onoda, Hiroshi
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Issue Date
Title
Author(s)
2013
Microwave Annealing of Phosphorus and Cluster Carbon Implanted (100) and (110) Si
Cho, Ta-Chun
;
Lu, Yu-Lun
;
Yao, Jie-Yi
;
Lee, Yao-Jen
;
Sekar, Karuppanan
;
Tokoro, Nobuhiro
;
Onoda, Hiroshi
;
Krull, Wade
;
Current, Michael I.
;
Chao, Tien-Sheng
;
電子物理學系
;
Department of Electrophysics
