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Browsing by Author Pan, TJ
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Showing results 1 to 2 of 2
Issue Date
Title
Author(s)
1-May-2004
Influence of N2O plasma treatment on microstructure and thermal stability of WNx barriers for Cu interconnection
Tsai, KC
;
Wu, WF
;
Chen, JC
;
Pan, TJ
;
Chao, CG
;
材料科學與工程學系
;
Department of Materials Science and Engineering
2005
Numerical and experimental analysis of Cu diffusion in plasma-treated tungsten barrier
Tsai, KC
;
Wu, WF
;
Chen, JC
;
Pan, TJ
;
Chao, CG
;
材料科學與工程學系
;
Department of Materials Science and Engineering
