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National Chiao Tung University Institutional Repository
Browsing by Author Shy, Shyi-Long
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Nov-2011
A Novel Nanoinjection Lithography (NInL) Technology and Its Application for 16-nm Node Device Fabrication
Chen, Hou-Yu
;
Chen, Chun-Chi
;
Hsueh, Fu-Kuo
;
Liu, Jan-Tsai
;
Shy, Shyi-Long
;
Wu, Cheng-San
;
Chien, Chao-Hsin
;
Hu, Chenming
;
Huang, Chien-Chao
;
Yang, Fu-Liang
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
