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Browsing by Author Tang, S. S.
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Issue Date
Title
Author(s)
19-Feb-2007
Use of Si+ pre-ion-implantation on Si substrate to enhance the strain relaxation of the GexSi1-x metamorphic buffer layer for the growth of Ge layer on Si substrate
Hsieh, Y. C.
;
Chang, E. Y.
;
Luo, G. L.
;
Pilkuhn, M. H.
;
Tang, S. S.
;
Chang, C. Y.
;
Yang, J. Y.
;
Chung, H. W.
;
材料科學與工程學系
;
Department of Materials Science and Engineering
