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Browsing by Author Tsai, Bo-An

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Showing results 1 to 5 of 5
Issue DateTitleAuthor(s)
1-Oct-2013Low-Temperature Microwave Annealing for MOSFETs With High-k/Metal Gate StacksLee, Yao-Jen; Tsai, Bo-An; Lai, Chiung-Hui; Chen, Zheng-Yao; Hsueh, Fu-Kuo; Sung, Po-Jung; Current, Michael I.; Luo, Chih-Wei; 電子物理學系; Department of Electrophysics
2012Low-Temperature Microwave Annealing Process for Dopant Activation and Thermal Stability of TiN MaterialTsai, Bo-An; Lai, Chiung-Hui; Lee, Bo-Shiun; Luo, Chih-Wei; Lee, Yao-Jen; 電子物理學系; Department of Electrophysics
2014Low-temperature Microwave Annealing Processes for Future IC FabricationLee, Yao-Len; Tsai, Bo-An; Cho, Ta-Chun; Hsueh, Fu-Kuo; Sung, Po-Jung; Lai, Chiung-Hui; Luo, Chih-Wei; Chao, Tien-Sheng; 電子物理學系; Department of Electrophysics
1-Apr-2008Using spike-anneal to reduce interfacial layer thickness and leakage current in metal-oxide-semiconductor devices with TaN/Atomic layer deposition-grown HfAlO/chemical oxide/Si structureTsai, Bo-An; Lee, Yao-Jen; Peng, Hsin-Yi; Tzeng, Pei-Jer; Luo, Chih-wei; Chang-Liao, Kuei-Shu; 電子物理學系; Department of Electrophysics
2013低溫微波退火在互補式金氧半場效電晶體之研究蔡博安; Tsai, Bo-An; 李耀仁; 羅志偉; Lee, Yao-Jen; Luo, Chih-Wei; 電子物理系所
Showing results 1 to 5 of 5