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National Chiao Tung University Institutional Repository
Browsing by Author Tsen, Huan-Chiu
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
1-Jan-2007
A thin FinFET Si-fin body structure fabricated with 193nm scanner photolithography and composite hard mask etching technique upon bulk-Si substrate
Liao, Wen-Shiang
;
Liu, Yu-Huan
;
Chang, Wen-Tung
;
Chen, Tung-Hung
;
Shih, Tommy
;
Tsen, Huan-Chiu
;
Chung, Lee
;
材料科學與工程學系
;
Department of Materials Science and Engineering
