瀏覽 的方式: 作者 Tu, Hung-En
顯示 1 到 5 筆資料,總共 5 筆
| 公開日期 | 標題 | 作者 |
| 1-一月-2015 | Effect of Porogen Incorporation on Pore Morphology of Low-k SiCxNy Films Prepared Using PECVD | Tu, Hung-En; Su, Chun-Jen; Jeng, U-Ser; Leu, Jihperng; 材料科學與工程學系; Department of Materials Science and Engineering |
| 1-十一月-2012 | Effect of surfactants on the porogen size in the low-k methylsilsesquioxane/polystyrene hybrid films | Chen, Yu-Han; Tu, Hung-En; Leu, Jihperng; 材料科學與工程學系; Department of Materials Science and Engineering |
| 2012 | Low-k SiCxNy Films Prepared by Plasma-Enhanced Chemical Vapor Deposition Using 1,3,5-trimethyl-1,3,5-trivinylcyclotrisilazane Precursor | Tu, Hung-En; Chen, Yu-Han; Leu, Jihperng; 材料科學與工程學系; Department of Materials Science and Engineering |
| 1-九月-2015 | Pore morphology of low-k SiCxNy films prepared with a cyclic silazane precursor using plasma-enhanced chemical vapor deposition | Tu, Hung-En; Su, Chun-Jen; Jeng, U-Ser; Leu, Jihperng; 材料科學與工程學系; Department of Materials Science and Engineering |
| 2014 | 利用電漿輔助化學氣相沉積系統製備低介電碳氮化矽薄膜之研究 | 凃弘恩; Tu, Hung-En; 呂志鵬; Leu, Jihperng; 材料科學與工程學系所 |