Browsing by Author Tuan, A
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) |
| 1-Aug-2002 | Impact of nitrogen and/or fluorine implantation on deep-submicron Co-salicide process | Chang, TY; Lei, TF; Chao, TS; Chen, SW; Kao, LM; Chen, SK; Tuan, A; Su, TP; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-Apr-1999 | Improvement of ultra-thin 3.3 nm thick oxide for co-salicide process using NF3 annealed poly-gate | Chang, TY; Lei, TF; Chao, TS; Huang, CT; Chen, SK; Tuan, A; Chou, S; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 13-Apr-2000 | Low contact resistance of poly-plug structure by in-situ HF-vapour cleaning | Chen, JH; Lei, TF; Chao, TS; Su, TP; Huang, SJ; Tuan, A; Chen, SK; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 31-Oct-1997 | Stabilizing dielectric constant of fluorine-doped SiO2 film by N2O and NH3 plasma post-treatment | Mei, YJ; Chang, TC; Chang, SJ; Pan, FM; Chen, MSK; Tuan, A; Chou, S; Chang, CY; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
