瀏覽 的方式: 作者 Wu, SA
顯示 1 到 2 筆資料,總共 2 筆
| 公開日期 | 標題 | 作者 |
| 1-五月-2004 | Effect of deposition temperature, on thermal stability in high-density plasma chemical vapor deposition fluorine-doped silicon dioxide | Cheng, YL; Wang, YL; Chen, HW; Lan, JL; Liu, CP; Wu, SA; Wu, YL; Lo, KY; Feng, MS; 材料科學與工程學系; Department of Materials Science and Engineering |
| 1-七月-2004 | Optimization of post-N-2 treatment and undoped-Si-glass cap to improve metal wring delamination in deep submicron high-density plasma-fluorinated silica glass intermetal dielectric application | Cheng, YL; Wang, YL; Lan, JK; Wu, SA; Chang, SC; Lo, KY; Feng, MS; 材料科學與工程學系; Department of Materials Science and Engineering |