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Browsing by Author Yang, WL
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Showing results 1 to 16 of 16
Issue Date
Title
Author(s)
1-Jan-2001
Barrier capability of TaNx films deposited by different nitrogen flow rate against Cu diffusion in Cu/TaNx/n(+)-p junction diodes
Yang, WL
;
Wu, WF
;
Liu, DG
;
Wu, CC
;
Ou, KL
;
機械工程學系
;
Department of Mechanical Engineering
1-Mar-2006
Crystal orientation and nitrogen effects on the carrier mobility of p-type metal oxide semiconductor field effect transistor with ultra thin gate dielectrics
Lee, YJ
;
Ho, PT
;
Yang, WL
;
Chao, TS
;
Huang, TY
;
電子物理學系
;
電子工程學系及電子研究所
;
Department of Electrophysics
;
Department of Electronics Engineering and Institute of Electronics
1-Jul-2001
High quality interpoly dielectrics deposited on the nitrided-polysilicon for nonvolatile memory devices
Yang, WL
;
Chao, TS
;
Cheng, CM
;
Pan, TM
;
Lei, TF
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Feb-2001
High quality interpoly-oxynitride grown by NH3 nitridation and N2O RTA treatment
Pan, TM
;
Lei, TF
;
Yang, WL
;
Cheng, CM
;
Chao, TS
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
15-Jun-2000
Improvement of polysilicon oxide integrity using NF3-annealing
Yang, WL
;
Shieh, MS
;
Chen, YM
;
Chao, TS
;
Liu, DG
;
Lei, TF
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Nov-2002
Improving the electrical integrity of Cu-CoSi2 contacted n(+)p junction diodes using nitrogen-incorporated Ta films as a diffusion barrier
Yang, WL
;
Wu, WF
;
You, HC
;
Ou, KL
;
Lei, TF
;
Chou, CP
;
機械工程學系
;
電子物理學系
;
Department of Mechanical Engineering
;
Department of Electrophysics
1-Nov-1996
Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistors
Lin, HY
;
Chang, CY
;
Lei, TF
;
Liu, FM
;
Yang, WL
;
Cheng, JY
;
Tseng, HC
;
Chen, LP
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Nov-1996
Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistors
Lin, HY
;
Chang, CY
;
Lei, TF
;
Liu, FM
;
Yang, WL
;
Cheng, JY
;
Tseng, HC
;
Chen, LP
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Sep-2004
Mobility enhancement of MOSFETs on p-silicon (111) with in situ HF-Vapor. pre-gate oxide cleaning
Chao, TS
;
Lin, YH
;
Yang, WL
;
電子物理學系
;
Department of Electrophysics
2004
NBTI effects of pMOSFETs with different nitrogen dose imlantation
Lee, YJ
;
Tang, LC
;
Wu, MH
;
Chao, TS
;
Ho, PT
;
Lai, D
;
Yang, WL
;
Huang, TY
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Jul-2000
Novel cleaning solutions for polysilicon film post chemical mechanical polishing
Pan, TM
;
Lei, TF
;
Chen, CC
;
Chao, TS
;
Liaw, MC
;
Yang, WL
;
Tsai, MS
;
Lu, CP
;
Chang, WH
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Jan-2006
Reduction of donor-like interface traps of n-type metal-oxide-semiconductor field-effect-transistors using hydrogen-annealed wafer and in-situ HF-vapor treatment
Chao, TS
;
Lin, YH
;
Yang, WL
;
電子物理學系
;
Department of Electrophysics
1-May-2000
Retardation in the chemical-mechanical polish of the boron-doped polysilicon and silicon
Yang, WL
;
Cheng, CY
;
Tsai, MS
;
Liu, DG
;
Shieh, MS
;
交大名義發表
;
National Chiao Tung University
1-Jul-2003
Stability investigation of single-wafer process by using a spin etcher
Kang, TK
;
Wang, CC
;
Tsui, BY
;
Yang, WL
;
Chien, FT
;
Yang, SY
;
Chang, CY
;
Li, YH
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
19-Jun-1997
Suppression of boron penetration by using inductive-coupling-nitrogen-plasma in stacked amorphous/polysilicon gate structure
Yang, WL
;
Lin, CJ
;
Chao, TS
;
Liu, DG
;
Lei, TF
;
電子物理學系
;
電子工程學系及電子研究所
;
Department of Electrophysics
;
Department of Electronics Engineering and Institute of Electronics
1-Nov-2004
Suppression of boron penetration in P+-poly-SiGe gate p-channel metal-oxide-semiconductor field-effect transistor using NH3-nitrided and N2O-grown gate oxides
Yang, WL
;
Chao, TS
;
Lai, KH
;
電子物理學系
;
Department of Electrophysics