标题: Optical properties of surface micromachining with randomly distributed etch holes
作者: Tien, CH
Lee, CH
光电工程学系
显示科技研究所
Department of Photonics
Institute of Display
关键字: MEMS;etch holes;diffraction
公开日期: 1-二月-2006
摘要: Optical micromachining or microelectromechanical systems (MEMS) typically require etch holes to reduce the time required to release the micromechanical structure during the sacrificial undercutting. However, high-order diffraction beams generated by the periodic etch-hole array often deteriorate the optical performance by generating noise and erroneous crosstalk signals in. most optical systems. In this study, we examined the diffraction from a perforated micromirror and proposed a random distributed etch-hole layout. Due to the superposition of cosine functions with random periods, noise caused by high-order beams can be averaged effectively.
URI: http://dx.doi.org/10.1143/JJAP.45.1015
http://hdl.handle.net/11536/12694
ISSN: 0021-4922
DOI: 10.1143/JJAP.45.1015
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Volume: 45
Issue: 2A
起始页: 1015
结束页: 1017
显示于类别:Articles


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