Title: | Memory effect of sol-gel derived V-doped SrZrO3 thin films |
Authors: | Liu, CY Chuang, CC Chen, JS Wang, A Jang, WY Young, JC Chiu, KY Tseng, TY 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
Keywords: | SrZrO3;memory effect;nonvolatile memory;RRAM |
Issue Date: | 3-Jan-2006 |
Abstract: | V-doped SrZrO3 (SZO) thin films on LaNiO3/SiO2/Si substrate are synthesized by sol-gel method to form metal-insulator-metal (MIM) sandwich structure. The physical and electrical properties of the MIM device are studied. The structure and surface morphology of the SZO films are also characterized by X-ray diffraction and scanning electron microscopy. Such a device has the bistable switching properties of current-voltage characteristics. The resistive switching between high state and low state can also be operated with voltage pulses. The device with the properties of long retention time and non-destructive readout is expected to be suitable for nonvolatile memory application. (c) 2005 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.tsf.2005.08.153 http://hdl.handle.net/11536/12748 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2005.08.153 |
Journal: | THIN SOLID FILMS |
Volume: | 494 |
Issue: | 1-2 |
Begin Page: | 287 |
End Page: | 290 |
Appears in Collections: | Conferences Paper |
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