| Title: | 藉由修飾濺鍍氮化鋁緩衝層在圖形化藍寶石基板上以改善氮化鎵品質 Improved GaN quality by modifying sputter AlN buffer layer on pattern sapphire substrate |
| Authors: | 郭彥廷 吳耀銓 Kuo,Yen-Ting Wu, Yew-Chung 材料科學與工程學系所 |
| Keywords: | 圖形化藍寶石基板;氮化鋁;pattern sapphire substrate;AlN |
| Issue Date: | 2017 |
| URI: | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070451525 http://hdl.handle.net/11536/142697 |
| Appears in Collections: | Thesis |
