修飾溼蝕刻藍寶石圖形化基板對用氧化鋁當緩衝層之氮化鎵磊晶之影響

Full metadata record

DC Field	Value	Language
dc.contributor.author	藍元志	zh_TW
dc.contributor.author	吳耀銓	zh_TW
dc.contributor.author	Lian, Yuan-Chi	en_US
dc.contributor.author	Wu, Yew-Chung	en_US
dc.date.accessioned	2018-01-24T07:42:38Z	-
dc.date.available	2018-01-24T07:42:38Z	-
dc.date.issued	2017	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070451516	en_US
dc.identifier.uri	http://hdl.handle.net/11536/142752	-
dc.language.iso	zh_TW	en_US
dc.subject	藍寶石基板	zh_TW
dc.subject	溼蝕刻	zh_TW
dc.subject	氮化鋁緩衝層	zh_TW
dc.subject	發光二極體	zh_TW
dc.subject	氮化鎵磊晶	zh_TW
dc.subject	sapphire	en_US
dc.subject	wet-etched	en_US
dc.subject	AlN buffer layer	en_US
dc.subject	LED	en_US
dc.subject	GaN epitaxy	en_US
dc.title	修飾溼蝕刻藍寶石圖形化基板對用氧化鋁當緩衝層之氮化鎵磊晶之影響	zh_TW
dc.title	Effect of Modifying Wet-etched Patterned Sapphire Substrate on GaN Epitaxial Behavior using AlN as buffer layer	en_US
dc.type	Thesis	en_US
dc.contributor.department	材料科學與工程學系所	zh_TW
Appears in Collections:	Thesis