矽奈米電子元件於生醫與氣體感測研究

标题:	矽奈米电子元件于生医与气体感测研究 Study of Silicon Nano-electronic Devices as biosensor and gas sensor
作者:	林儒政许钲宗潘扶民 Lin, Ru-Zheng Sheu, Jeng-Tzong Pan, Fu-Ming 材料科学与工程学系奈米科技硕博士班
关键字:	奈米线;环绕式闸极;无接面电晶体;反转式电晶体;矽奈米带;区域焦耳热;电浆增进原子层沉积;电浆辅助化学气相沈积;选择性沉积;nanowire (NW);gate-all-around (GAA);transistor;junctionless (JL);inversion mode (IM);silicon nanobelt;localized Joule heating;plasma-enhanced atomic layer deposition;plasma-enhanced chemical vapor deposition;selective deposition
公开日期:	2018
URI:	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070081603 http://hdl.handle.net/11536/142965
显示于类别：	Thesis

APA	林., 许., 潘., Lin, R., Sheu, J., & Pan, F. (2018). 矽奈米电子元件于生医与气体感测研究. http://hdl.handle.net/11536/142965.
Bibtex	@article{林儒政 and 许钲宗 and 潘扶民 and Lin2018, title={矽奈米电子元件于生医与气体感测研究}, author={林儒政 and 许钲宗 and 潘扶民 and Lin, Ru-Zheng and Sheu, Jeng-Tzong and Pan, Fu-Ming}, journal={http://hdl.handle.net/11536/142965}, year={2018}, url={http://140.113.37.243/handle/11536/142965?locale=zh_CN&mode=fulllocale%3Dzh_TW}, }