Title: | 二維材料的製作方法 |
Authors: | 侯拓宏 黃俊宏 |
Issue Date: | 16-Oct-2018 |
Abstract: | 本發明二維材料的製作方法包含以下步驟:於基板上形成具有至少一二維材料元素之薄膜;於薄膜上形成至少一包覆層;於包覆層形成後將薄膜進行退火,以形成二維材料膜。 |
Gov't Doc #: | H01L027/13 H01L021/324 |
URI: | http://hdl.handle.net/11536/151490 |
Patent Country: | TWN |
Patent Number: | 201838160 |
Appears in Collections: | Patents |
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