Title: 二維材料的製作方法
Authors: 侯拓宏
黃俊宏
Issue Date: 16-Oct-2018
Abstract: 本發明二維材料的製作方法包含以下步驟:於基板上形成具有至少一二維材料元素之薄膜;於薄膜上形成至少一包覆層;於包覆層形成後將薄膜進行退火,以形成二維材料膜。
Gov't Doc #: H01L027/13
H01L021/324
URI: http://hdl.handle.net/11536/151490
Patent Country: TWN
Patent Number: 201838160
Appears in Collections:Patents


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