Title: | LOW-TEMPERATURE DIAMOND GROWTH AND PLASMA SPECIES ANALYSIS USING METHANE-CARBON DIOXIDE GAS-MIXTURES |
Authors: | CHEN, CF CHEN, SH HONG, TM WANG, DP 材料科學與工程學系 Department of Materials Science and Engineering |
Issue Date: | 15-Sep-1994 |
URI: | http://hdl.handle.net/11536/2318 |
ISSN: | 0956-716X |
Journal: | SCRIPTA METALLURGICA ET MATERIALIA |
Volume: | 31 |
Issue: | 6 |
Begin Page: | 775 |
End Page: | 780 |
Appears in Collections: | Articles |