INVESTIGATION OF SI-SIO2 INTERFACE PROPERTIES FOR BONDED SILICON-ON-INSULATOR

Title:	INVESTIGATION OF SI-SIO2 INTERFACE PROPERTIES FOR BONDED SILICON-ON-INSULATOR
Authors:	YEH, CF KAO, HW CHANG, BS CHANG, KL 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
Issue Date:	1-Oct-1993
URI:	http://hdl.handle.net/11536/2846
ISSN:	0261-8028
Journal:	JOURNAL OF MATERIALS SCIENCE LETTERS
Volume:	12
Issue:	19
Begin Page:	1506
End Page:	1507
Appears in Collections:	Articles