Metallo-organic chemical vapor deposition of tantalum carbide and tantalum nitride thin films from (BuCH)-Bu-t=Ta(CH2 Bu-t)(3) and (BuN)-Bu-t=Ta(CH2 Bu-t)(3).

Title:	Metallo-organic chemical vapor deposition of tantalum carbide and tantalum nitride thin films from (BuCH)-Bu-t=Ta(CH2 Bu-t)(3) and (BuN)-Bu-t=Ta(CH2 Bu-t)(3).
Authors:	Chiu, HT Chang, YH Chang, PJ Wu, JB Peng, SM Lee, GH 應用化學系 Department of Applied Chemistry
Issue Date:	7-Apr-2002
URI:	http://hdl.handle.net/11536/28863
ISSN:	0065-7727
Journal:	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume:	223
Issue:
Begin Page:	A48
End Page:	A48
Appears in Collections:	Articles