Title: A novel transient simulation for 3-D multilevel interconnections on complex topography
Authors: Hou, HM
Sheen, CS
Wu, CY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: boundary-element method;Green's function;multilevel interconnection;Pade-via-Lanczos algorithm;ULSI
Issue Date: 1-Apr-1999
Abstract: An efficient method is presented to model the transient characteristics of distributed resistor-capacitor of ULSI multilevel interconnections on complex topography, in which the reformulation of the boundary-element method (BEM) and the Pade-via-Lanczos (PVL) algorithm associated with multilayer Green's function can avoid the redundant works on both volume mesh and transient analysis associated with the finite-difference method. An adaptive multilayer Green's function is adopted to investigate several cases that have revealed interesting physical mechanisms in charge transfer between conductors on multilayer topography. To improve the timing analysis efficiency of the finite-difference method, the dominant poles are obtained by introducing the PVL algorithm for model-ol der reduction. Hence, it is easy to calculate the transient characteristics of both parallel conductors and complicated configurations such as crossing lines, corners, contacts, multilayers, and their combinations.
URI: http://dx.doi.org/10.1109/16.753702
http://hdl.handle.net/11536/31432
ISSN: 0018-9383
DOI: 10.1109/16.753702
Journal: IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume: 46
Issue: 4
Begin Page: 690
End Page: 695
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