Title: Parameter extraction of resistive thermal microsensors by AC electrical method
Authors: Ou-Yang, M
Sheen, CS
Shie, JS
光電工程學系
Department of Photonics
Keywords: AC electrical method thermal variables measurement;electrothermal effect;parameter extraction;thermal microsensors
Issue Date: 1-Apr-1998
Abstract: Obtaining device parameters of thermal microsensors is essential for evaluating their performances and simulation modeling. We report an sc electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance, and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results are compared with other methods.
URI: http://hdl.handle.net/11536/32709
ISSN: 0018-9456
Journal: IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
Volume: 47
Issue: 2
Begin Page: 403
End Page: 408
Appears in Collections:Articles


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