INFRARED SPECTROSCOPIC STUDY OF MERCURY-SENSITIZED PHOTO-CVD SILICON-OXIDE

Title:	INFRARED SPECTROSCOPIC STUDY OF MERCURY-SENSITIZED PHOTO-CVD SILICON-OXIDE
Authors:	LAN, WH TU, SL YANG, SJ HUANG, KF 電子物理學系光電工程學系 Department of Electrophysics Department of Photonics
Issue Date:	1-Jun-1990
URI:	http://hdl.handle.net/11536/4091
ISSN:	0021-4922
Journal:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume:	29
Issue:	6
Begin Page:	997
End Page:	1003
Appears in Collections:	Articles

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